Line narrowing module
NettetA line-narrowing module, for use in an excimer or moleciûlar fluorine laser, includes a beam expander with one or more prisms (30-33), a reflection grating (35) and optionally one or more interferometric devices, e.g. and etalon (50). In one embodiment, the grating (35) is coupled to heat sink (38), whereby the grating is thermally and mechanically … Nettet27. nov. 2005 · An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating In one application, the apparatus may be used as a line narrowing module for a laser …
Line narrowing module
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Nettet7. nov. 2003 · The roadmap of semiconductor fabrication predicts that the semiconductor market will demand 65 nm node devices from 2004/2005. Therefore, an Ultra-Line-Narrowed F 2 laser for dioptric projection systems has been developed under the ASET project of "The F 2 Laser Lithography Development Project". The target of this project is … NettetG41A has showed high reliability and long lifetime over 5 billion pulses. In this paper, we report on the 4 kHz ArF excimer laser for mass production, model G42A, which has 20 W, spectral bandwidth less than 0.3 pm (FWHM) and a spectral purity less than 0.75 pm (E95). Keywords: excimer laser, ArF, 193-nm, microlithography, line-narrowing, high ...
Nettet16. mar. 2007 · The GT61A ArF laser light source with ultra line narrowed spectrum, which meets the demand of hyper NA (NA > 1.3) immersion tool, is introduced. The GT61A aims at improving spectrum performance from value E95 0.5pm of GT60A. The spectrum performance 0.3pm or less was achieved by developing an ultra line narrowing … NettetWhen modified using a specially developed line-narrowing module, the laser produces an average output power of ~0.5W in a minimum linewidth of <5pm FWHM. With this module, the laser may be tuned between wavelengths of 192.75 - 193.75nm and the bandwidth selected between 370-5pm FWHM. Figure 1. Exitech 193nm excimer laser …
NettetA line narrowed laser having a grating based line narrowing module, etalon-based line narrowing output coupler and a technique for tuning the laser. The etalon based output coupler is adjusted to preferentially reflect light at or near the spectral maximum produced by the grating. Substantial improvement in line narrowing results from the amplification … NettetBandwidth and wavelength control take place within a light source’s line narrowing module (LNM), which comprises a grating reflector and optics on one end of the light …
NettetA line narrowed laser having a grating based line narrowing module and etalon-based line narrowing output coupler and a technique for tuning the laser. The etalon based output coupler is adjusted to preferentially reflect light at or near the spectral maximum produced by the grating. Substantial improvement in line narrowing results from the …
Nettet1. jan. 2002 · The spectrum performance 0.3pm or less was achieved by developing an ultra line narrowing module newly. Moreover, in 45nm node, since it indispensably requires OPC ... recovery icbc.comNettet26. mar. 2007 · The GT61A ArF laser light source with ultra line narrowed spectrum, which meets the demand of hyper NA (NA > 1.3) immersion tool, is introduced. The GT61A … recovery ice podNettet9. jul. 2024 · WO2006060360A2 - Line narrowing module - Google Patents Line narrowing module Download PDF Info Publication number WO2006060360A2. … uon physiotherapy program planNettetIn a spectrally narrowed laser, a line-narrowing subsystem is added to the rear of the laser. This module reduces the optical bandwidth from the free-running width of about 300 pm down to 1–3 pm. Figure 8.10 shows the KrF gain profile and the narrowing required for laser stepper lenses (all-refractive). recovery ibm thinkpadNettetA line-narrowing module, for use in an excimer or moleciûlar fluorine laser, includes a beam expander with one or more prisms (30-33), a reflection grating (35) and optionally … recovery ice breaker gamesNettet1. nov. 2011 · Request PDF Optimal Design of Prism Beam Expander in Line Narrowed Excimer Laser Cavity Prism beam expander (PBE) is widely used in the spectral narrowing module of excimer lasers. The beam ... recovery ice packrecovery icebreakers for adult groups